美***SONIX 晶圓檢測設(shè)備 AutoWafe Pro.
SONIX AutoWafer Pro™ 是專為全自動晶圓檢測設(shè)計的機型,主要應(yīng)用在Bond wafer,MEMS 內(nèi)部空洞、離層檢測,TSV量測方面。
● 使用于200和300mm晶圓
● 符合******凈化間標準
● Cassette裝載,全自動檢測,支持FOUP或FOSB機械臂
● 支持200mm & 300mm SECS/GEM協(xié)議
● KLARF輸出文件
AutoWafe Pro, SONIX wafer detection device.
SONIX AutoWafer Pro™ is designed for fully automatic wafer detection, mainly for Bond wafer, MEMS internal cavity detection, separation detection, and TSV measurement.
● for 200 mm and 300mm wafers
● comply with the standard of first class purification room
Cassette loaded, fully automatic detection, support for FOUP or FOSB manipulator
● support 200mm & 300mm SECS/GEM protocol
● KLARF output file